MEMS
(MicroElectroMechanicalSystems) and micromechanical parts are placing
new demands on surface metrology equipment due to the fragility and
small size of the components being fabricated.
MEMS technology is gaining ever-increasing R&D effort to produce high
volume, low cost electromechanical structures and systems for a variety
of uses. These can range from pressure or airbag sensors and acceleration
transducers up to ink jet cartridges or read/write heads.
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