Laser Profilometer combining UBM design
& Keyence technology

Non-destructive profilometry for a variety of surfaces Fast and easy setup High troughput An inspection tool suitable for both Engineering/R&D and QA Advanced enough for engineers, simple enough for semi-skilled operators

The UBM/Keyence Profilometer is a 3D laser measurement system for non-contact measurement and analysis of surfaces. The Keyence LT sensor uses the Confocal Principle of "Dynamic Focusing" ensuring stable, error-free measurements. A laser beam with a spot size of 2 µm is used to scan the surface.
The LT measurement technique is unaffected by the color, luster, or texture of the target surface and therefore allows soft, touch-sensitive and transparent surfaces to be quantified. And because it measures even wet surfaces reliably, it eliminates the need for costly drying processes.
The system is provided with sub-micron resolution in all axes, thus enabling accurate determination of 3D surface features without limitation of point density. The user can inspect the region of interest as measurements are being performed by means of a built in CCD microscope.

Customer Applications include:

• Analysis of MEMS and micromechanical parts such as ink jet printer heads
• Measurement of probe parts and other medical devices
• Tribological surface characterization and wear analysis
• Characterization of mirror-surfaced targets such as metallic objects and compact discs
• Measurement of inclined surfaces, which makes it ideal for tracing the curve of contact lenses with high accuracy