The NanoSurf Whitelight Confocal Microscope:
Fast optical surface measurement

Bridge Configuration	Column Configuration

• Comparable to Whitelight Interferometer technology
• Complex surface form analysis
• Sub-micron roughness measurement
• Nano-metric accuracy
• Real time data acquisition & evaluation
• Easy to setup and use
• Powerful software

Designed for R&D and quality control as an independent 3D optical measurement system, the NanoSurf scanning confocal microscope is based on a whitelight-confocal technology which is comparable to whitelight Interferometers.
The unit is controlled by powerful and user-friendly software providing fast data acquisition and various ways of topography analysis. Without producing optical artefacts the NanoSurf measures optically complex surface structures with high vertical and lateral resolution and accuracy (vertical resolution better than 5 nm).
Measuring results using surface roughness standards show a correlation to the most accurate tactile instruments. The NanoSurf is the only non-destructive measuring system that provides this high level of correlation for non-contact characterization of complex surface structures.

Customer Applications include:

• MEMS such as sensors and optoelectronic parts
• IC Packaging, height, width and volume calculation
• Measurement of thick film on ceramics, height and width analysis
• Length and structure of paper and textiles
• Mechanical engineering components like bearing balls, sheet metal and abrasives

243 K	For more information on the NanoSurf, please download our datasheet.

photoresist on glass substrate		x-ray detector in Si-technique
copy roller machine		tool coatings

If you would like to view more measurement examples, please download the NanoSurf Application Sheets:
135 K	Application Sheet Microelectronics
88 K	Application Sheet Engineering Surfaces