The surface analysis software SolarMap from UBM Corporation supports a variety of file formats in the metrology industry such as:

• Wyko (.opd)
• Digital Instruments (.ns2, .ns3)
• KLA-Tencor (.3dd, .rwt, .rwb)
• Phase Shift Technology (.map)
• Taylor Hobson (.prf, .map, .sur, .pro, .hvi)
• Burleigh Instruments (.img, .bii, .d40)
• Rodenstock (.rd3, rd2)
• Topometrix (.tfr)